Title :
Domain Decomposition Method Applied to 3D Finite Element Process Simulation
Author :
Herbaux, J. ; Brocard, D. ; Baccus, B. ; Senez, V. ; Bozek, S.
Author_Institution :
IEMN-ISEN, 41 boulevard Vauban, 59046 Lille cedex, France
Abstract :
This paper presents a novel approach for solving large sparse linear system arising from 3D finite element process simulation. This new method, also called the domain decomposition technique, is based on a reordering of the unknowns with respect of a partitioning of the structure. One of its major interest is in its easy parallel implementation.
Keywords :
Boron; Concurrent computing; Convergence; Equations; Finite element methods; Iterative methods; Linear systems; Matrix decomposition; Semiconductor devices; Symmetric matrices;
Conference_Titel :
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location :
Bologna, Italy
