DocumentCode
513871
Title
Low Dielectric Constant Spin-on-Polymers for Interlayer Dielectric Applications
Author
Sun, S.C. ; Chuang, Y.C.
Author_Institution
National Nano Device Laboratory, National Chiao Tung University, Hsinchu, Taiwan, R.O.C.
fYear
1996
fDate
9-11 Sept. 1996
Firstpage
101
Lastpage
104
Abstract
This paper will present the characterization results of two low dielectric constant methylsilsesquioxane spin-on polymers and a conventional siloxane SOG. The chemical bonding structure, thermal stability, stress-temperature variations and the leakage current will be examined.
Keywords
Bonding; Chemicals; Curing; Dielectric constant; Dielectric materials; Dielectric measurements; Leakage current; Polymer films; Sun; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1996. ESSDERC '96. Proceedings of the 26th European
Conference_Location
Bologna, Italy
Print_ISBN
286332196X
Type
conf
Filename
5436229
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