Institute of Chemistry, Solid State Chemistry Group, University of Uppsala, P. O. Box 531, S-751 21 Uppsala, Sweden
fYear :
1987
fDate :
14-17 Sept. 1987
Firstpage :
347
Lastpage :
358
Keywords :
Chemical technology; Chemical vapor deposition; Chemistry; Contamination; Etching; Inductors; Metallization; Temperature; Tungsten; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
