• DocumentCode
    513964
  • Title

    CVD and I.C. Metallization

  • Author

    Carlsson, Jan-Otto

  • Author_Institution
    Institute of Chemistry, Solid State Chemistry Group, University of Uppsala, P. O. Box 531, S-751 21 Uppsala, Sweden
  • fYear
    1987
  • fDate
    14-17 Sept. 1987
  • Firstpage
    347
  • Lastpage
    358
  • Keywords
    Chemical technology; Chemical vapor deposition; Chemistry; Contamination; Etching; Inductors; Metallization; Temperature; Tungsten; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
  • Conference_Location
    Bologna, Italy
  • Print_ISBN
    0444704779
  • Type

    conf

  • Filename
    5436574
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=513964