Title :
Narrow-width Effects in Submicron MOS ICs
Author :
Klaassen, F.M. ; van der Plas, P.A. ; Debets, R.J.W. ; Wils, N.A.H. ; Pitt, M.G.
Author_Institution :
Philips Research Laboratories, P.O. Box 80000, 5600 JA Eindhoven, the Netherlands
Abstract :
The effects of an (almost) birds beak free LOCOS isolation configuration on the charactcristics of narrow-width MOSFETs has been investigated by 2-D device simulation and measurements of realized structures. Owing to the occurrence of excess inversion charge peaks at the LOCOS corners, an anomalous behaviour of the subthreshold characteristics and the threshold voltage is observed for device widths smaller than 1 ¿m. In addition a change of the birds beak length with the active area width results in a nonlinear dependence of the gain factor.
Keywords :
Area measurement; Birds; Charge measurement; Current measurement; Gain measurement; Length measurement; MOSFETs; Nanoscale devices; Programmable logic arrays; Shape measurement;
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany
