Title :
Scaling-down of Submicrometer GaAs MESFETs
Author :
Bannov, N. ; Valiev, K. ; Ryzhi, Y. ; Khrenov, G.
Author_Institution :
Institute of Physics and Technology, USSR Academy of Sciences, Moscow
Abstract :
Monte Carlo particle method is used to investigate the submicrometer GAs MESFET´ electrical characteristics transformation when all dimensions of transistor have been decreased proportionate. Essential influence of semiinsulated substrate parameters on characteristics transformation is demonstrated.
Keywords :
Electrons; Gallium arsenide; Insulation; Kinetic theory; MESFETs; Optical scattering; Plasma properties; Plasma simulation; Poisson equations; Substrates;
Conference_Titel :
Solid State Device Research Conference, 1989. ESSDERC '89. 19th European
Conference_Location :
Berlin, Germany
