DocumentCode
514063
Title
The Voltage-Doping Transformation a New Approach to the Modelling of MOSFET Short-Channel Effects
Author
Skotnicki, Tomasz ; Merckel, UGrard ; Pedron, Thierry
Author_Institution
CNET-CNS, BP 98, Chemin du Vieux Chêne, 38243 MEYLAN, FRANCE; Member of the ITE-CEMI, Warsaw, Poland
fYear
1987
fDate
14-17 Sept. 1987
Firstpage
543
Lastpage
546
Abstract
In this paper we show that the influence of the drain-source field on the potential barrier height is physically equivalent and can be replaced by the reduction in channel doping concentration according to the following formula N*= N-2cs V*DS /qL2 derived from the 2-d Poisson equation. Thus the actual barrier height for any drain bias VDS and channel length L can be easily calculated using the well-known 1-d (long-channel) solutions. This simple but general procedure, hereafter called the Voltage-Doping Transformation (VDT) has been examined with fairly good results by comparison of the analytically calculated potential distributions with 2-d numerical simulation. An examplary application of the VDT to threshold voltage calculations is also shown.
Keywords
Analytical models; Cathodes; Current measurement; Doping; MOSFET circuits; Numerical simulation; Poisson equations; Semiconductor process modeling; Threshold voltage; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location
Bologna, Italy
Print_ISBN
0444704779
Type
conf
Filename
5436698
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