Title :
Small Geometry NMOS Transistors in Silicon-on-Sapphire using Rapid Annealed Source/Drains and Improved Crystalline Quality Silicon Films
Author :
Field, M ; Cowern, N.E.B. ; Godfrey, D J
Author_Institution :
GEC Research Limited, Hirst Research Centre, East Lane, Wembley, Middlesex HA9 7PP
Keywords :
Annealing; CMOS technology; Crystalline materials; Crystallization; Geometry; Implants; MOSFETs; Parasitic capacitance; Semiconductor films; Silicon on insulator technology;
Conference_Titel :
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location :
Bologna, Italy
