Title :
The Effect of the Proximity of the Bird´s Beak on Aging of the Thin Oxide by High Field Current Stress
Author :
Marchetaux, J.-C. ; Doyle, B. ; Boudou, A.
Author_Institution :
BULL S.A., Ave Jean-Jaures, 78340 Les Clayes sous Bois, FRANCE.
Keywords :
Aging; Capacitance-voltage characteristics; Capacitors; Circuits; Electrons; Fabrication; Interface states; Stress; Very large scale integration; Voltage;
Conference_Titel :
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location :
Bologna, Italy
