Title :
A 18 μm2 cell for Megabit CMOS EPROM
Author :
Camerlenghi, E. ; Caprara, P. ; Crisenza, G.
Author_Institution :
SGS Microelettronica, via C. Olivetti 2, 20041 Agrate Brianza (MI)-Italy
Abstract :
A process technology for realzizng highly compact EPROM devices has been described; in particular the structure and the electrical characterization of a 18 μm2 memory cell has been reported, pointing out good speed performances together with good manufacturability qualities. This technology has beein verified using 64K memory, and at present it is utilized to manufacture a 1Mbit memory.
Keywords :
CMOS process; CMOS technology; Computer architecture; EPROM; High performance computing; Memory architecture; PROM; Testing; Threshold voltage; Writing;
Conference_Titel :
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location :
Bologna, Italy