DocumentCode
514095
Title
A 18 μm2 cell for Megabit CMOS EPROM
Author
Camerlenghi, E. ; Caprara, P. ; Crisenza, G.
Author_Institution
SGS Microelettronica, via C. Olivetti 2, 20041 Agrate Brianza (MI)-Italy
fYear
1987
fDate
14-17 Sept. 1987
Firstpage
765
Lastpage
768
Abstract
A process technology for realzizng highly compact EPROM devices has been described; in particular the structure and the electrical characterization of a 18 μm2 memory cell has been reported, pointing out good speed performances together with good manufacturability qualities. This technology has beein verified using 64K memory, and at present it is utilized to manufacture a 1Mbit memory.
Keywords
CMOS process; CMOS technology; Computer architecture; EPROM; High performance computing; Memory architecture; PROM; Testing; Threshold voltage; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Device Research Conference, 1987. ESSDERC '87. 17th European
Conference_Location
Bologna, Italy
Print_ISBN
0444704779
Type
conf
Filename
5436743
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