1300 nm DFB-Laser with Reactive Ion Beam Etched Grating Deformation-Free Overgrown by LPE

DFB lasers were fabricated for the first time with gratings dry etched into InP substrate by reactive ion beam etching (RIBE). Deformation-free overgrowth of these 0.2 ¿m deep corrugations was performed by liquid phase epitaxy (LPE). Threshold currents (cw, 25 °C) as low as 23 mf demonstrate that no severe degradations occur in these devices due to surface damage caused by the dry etching. Single mode operation with a sidemode suppression ≫ 35 dB is obtained due to strong coupling of the grating. HF-measurements reveal a 3 dB dulation bandwidth of 9 GHz for the DFB-DC-DCPBH structure.