Title :
Dynamic Characterization Analysis System Based on Optical Measuring Methods
Author :
Bian Yan ; Guo Tong
Author_Institution :
Dept. of Autom. Eng., Tianjin Univ. of Technol. & Educ., Tianjin, China
Abstract :
Optical measuring methods are usually characteristic of fast, non-contact and high precision. This paper introduces a dynamic characterization analysis system of micro-electromechanical systems (MEMS) based on optical measuring methods. The system employed stroboscopic illumination, optical flow technology and microscopic interferometry to realize the measurement of in-plane and out-of-plane motions of a micro-machined lateral resonator. The experiments demonstrate the effectiveness of the system. This research can provide reliable experimental data feedback to the process of design and fabrication of movable MEMS devices.
Keywords :
image sequences; light interferometry; lighting; micromechanical resonators; stroboscopes; dynamic characterization analysis system; microelectromechanical systems; micromachined lateral resonator; microscopic interferometry; optical flow technology; optical measuring methods; stroboscopic illumination; Fluid flow measurement; Image motion analysis; Lighting; Microelectromechanical systems; Micromechanical devices; Optical feedback; Optical interferometry; Optical microscopy; Optical resonators; Process design; Micro-electromechanical systems (MEMS); dynamic characterization; microscopic interferometry; optical flow technology; stroboscopic illumination;
Conference_Titel :
Measuring Technology and Mechatronics Automation (ICMTMA), 2010 International Conference on
Conference_Location :
Changsha City
Print_ISBN :
978-1-4244-5001-5
Electronic_ISBN :
978-1-4244-5739-7
DOI :
10.1109/ICMTMA.2010.392
