Dynamic Characterization Analysis System Based on Optical Measuring Methods

Optical measuring methods are usually characteristic of fast, non-contact and high precision. This paper introduces a dynamic characterization analysis system of micro-electromechanical systems (MEMS) based on optical measuring methods. The system employed stroboscopic illumination, optical flow technology and microscopic interferometry to realize the measurement of in-plane and out-of-plane motions of a micro-machined lateral resonator. The experiments demonstrate the effectiveness of the system. This research can provide reliable experimental data feedback to the process of design and fabrication of movable MEMS devices.