• DocumentCode
    516597
  • Title

    Electron Beam Observability and Controlability for the Debugging of Integrated Circuits

  • Author

    Guiguet, I. ; Micollet, D. ; Laurent, J. ; Courtois, B.

  • Author_Institution
    COMPUTER ARCHITECTURE GROUP, IMAG/TIM3, 46 Avenue Félix VIALLET, 38031 GRENOBLE Cedex FRANCE
  • fYear
    1986
  • fDate
    16-18 Sept. 1986
  • Firstpage
    181
  • Lastpage
    183
  • Abstract
    Observability and controlability using an electron beam are addressed in this paper. For observability, a link between a CALMA description and a Scanning Electron Microscope (SEM), based on a superimposition technique, is detailled. For controlability, a study of the Electron Beam Induced Current (EBIC) phenomenon in a diffused diode is presented.
  • Keywords
    Adaptive arrays; Automatic testing; Automatic voltage control; Circuit testing; Debugging; Electron beams; Electron emission; Logic arrays; Observability; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 1986. ESSCIRC '86. Twelfth European
  • Conference_Location
    Delft, The Netherlands
  • Type

    conf

  • Filename
    5468396
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=516597