• DocumentCode
    516682
  • Title

    Status and Trends of SOI

  • Author

    Flandre, Denis ; Colinge, Jean-Pierre

  • Author_Institution
    Laboratoire de Microélectronique, Université catholique de Louvain, Place du Levant 3, B-1348 Louvain-la-Neuve, Belgium
  • fYear
    1994
  • fDate
    20-22 Sept. 1994
  • Firstpage
    18
  • Lastpage
    27
  • Abstract
    The evolution of the SOI material, devices and circuit applications is reviewed over the last ten years and demontrates that SOI has now reached a level of maturity which renders it suitable for a number of applications. Low-power, high-temperature, high-performance analog and microwave capabilities of SOI are discussed into further detail.
  • Keywords
    Aerospace materials; Circuits; Electromagnetic heating; Fabrication; Microwave devices; Optical materials; Semiconductor films; Silicon compounds; Silicon on insulator technology; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 1994. ESSCIRC '94. Twentieth European
  • Conference_Location
    Ulm, Germany
  • Print_ISBN
    2-86332-160-9
  • Type

    conf

  • Filename
    5468520
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=516682