• DocumentCode
    516707
  • Title

    A Low Noise, High Resolution Silicon Temperature Sensor

  • Author

    Szajda, Kenneth S. ; Sodini, Charles G. ; Bowman, H.Frederick

  • Author_Institution
    Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA 02139
  • fYear
    1994
  • fDate
    20-22 Sept. 1994
  • Firstpage
    304
  • Lastpage
    307
  • Abstract
    High resolution temperature measurement is essential for determination of blood perfusion in biomaterials. A compact, low noise, high resolution temperature sensor designed for use in an invasive tissue property measurement probe is presented. The technique uses feedback to improve linearity and reduce noise. Data from test chips shows temperature resolution of 6.8 m°C. The chips were fabricated using a 1.75 um double poly, single metal modified CMOS process designed for this project.
  • Keywords
    Blood; Feedback; Linearity; Noise measurement; Noise reduction; Probes; Semiconductor device measurement; Silicon; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 1994. ESSCIRC '94. Twentieth European
  • Conference_Location
    Ulm, Germany
  • Print_ISBN
    2-86332-160-9
  • Type

    conf

  • Filename
    5468545
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=516707