• DocumentCode
    517203
  • Title

    Microsystems: A Challenge for IC Designers

  • Author

    Degrauwe, M. ; Chevroulet, M. ; Bergqvist, J. ; Bardyn, J.-P.

  • Author_Institution
    CSEM Centre Suisse d´´Electronique et de Microtechnique SA, Jaquet-Droz 1, CH-2007 Neuchâtel, Switzerland
  • fYear
    1995
  • fDate
    19-21 Sept. 1995
  • Firstpage
    30
  • Lastpage
    33
  • Abstract
    Micromachined mechanics, magnetics and optics allow in conjunction with microelectronics the development of various microsystems. Scaling, co-integration and introduction of arrays of sensors and actuators render the task of the designer difficult. Innovations are required at the building block and system level.
  • Keywords
    Actuators; Electronics packaging; Force sensors; Integrated circuit interconnections; Magnetic sensors; Microelectronics; Micromachining; Optical sensors; Sensor arrays; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 1995. ESSCIRC '95. Twenty-first European
  • Conference_Location
    Lille, France
  • Print_ISBN
    2-86332-180-3
  • Type

    conf

  • Filename
    5469338
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=517203