Analysis and design of an all metal in line series ohmic RF MEMS switch for microwave applications

Author

Spasos, M. ; Charalampidis, N. ; Tsiakmakis, K. ; Nilavalan, R.

Author_Institution

Dept. of Electron., Alexander Technol. Educ. Inst., Thessaloniki, Greece

fYear

2010

fDate

5-7 May 2010

Firstpage

27

Lastpage

32

Abstract

This paper presents the analysis, design and simulation of an all metal in line series ohmic RF MEMS switch. The proposed switch is indented to be used in the frequency range between DC and 10GHz. The switching characteristics of the proposed switch fulfill all the requirements as concerns loss, isolation, linearity, power handling and small size/power consumption. The specific design of the cantilever (hammerhead) and the distributed actuation force ensure the reliability and the controllability of the switch and the relatively simple design (all metal) the robustness and high fabrication yield.

Keywords

cantilevers; microswitches; microwave switches; all metal in line series ohmic RF MEMS switch; cantilever design; distributed actuation force; fabrication yield; hammerhead; microwave application; power consumption; power handling; Communication switching; Consumer electronics; Contact resistance; Controllability; Electrodes; Electromagnetic analysis; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Voltage; All metal in line series ohmic RF MEMS switch; distributed actuation force; hammerhead;

fLanguage

English

Publisher

ieee

Conference_Titel

Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on

Conference_Location

Seville

Print_ISBN

978-1-4244-6636-8

Electronic_ISBN

978-2-35500-011-9

Type

conf

Filename

5486464