Title :
Analysis and design of an all metal in line series ohmic RF MEMS switch for microwave applications
Author :
Spasos, M. ; Charalampidis, N. ; Tsiakmakis, K. ; Nilavalan, R.
Author_Institution :
Dept. of Electron., Alexander Technol. Educ. Inst., Thessaloniki, Greece
Abstract :
This paper presents the analysis, design and simulation of an all metal in line series ohmic RF MEMS switch. The proposed switch is indented to be used in the frequency range between DC and 10GHz. The switching characteristics of the proposed switch fulfill all the requirements as concerns loss, isolation, linearity, power handling and small size/power consumption. The specific design of the cantilever (hammerhead) and the distributed actuation force ensure the reliability and the controllability of the switch and the relatively simple design (all metal) the robustness and high fabrication yield.
Keywords :
cantilevers; microswitches; microwave switches; all metal in line series ohmic RF MEMS switch; cantilever design; distributed actuation force; fabrication yield; hammerhead; microwave application; power consumption; power handling; Communication switching; Consumer electronics; Contact resistance; Controllability; Electrodes; Electromagnetic analysis; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Voltage; All metal in line series ohmic RF MEMS switch; distributed actuation force; hammerhead;
Conference_Titel :
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location :
Seville
Print_ISBN :
978-1-4244-6636-8
Electronic_ISBN :
978-2-35500-011-9
