Multilayered magneto-impedance microsensors for non destructive control

Author

Moulin, Johan ; Woytasik, Marion ; Shahosseini, Iman ; Alves, F.

Author_Institution

IEF, Univ. Paris Sud XI, Orsay, France

fYear

2010

fDate

5-7 May 2010

Firstpage

62

Lastpage

66

Abstract

Magnetic field microsensors based on the magneto-impedance phenomenon have been fabricated by stacking up ferromagnetic/conductive/ferromagnetic films. Their sensitivity is in the same range than macroscopic devices (i.e. 400 V/T/A) and is constant from 0 to 500 A m^-1. The ferromagnetic layer is a Finemet® alloy. Initially an amorphous material, it is nanocrystallized by heat treatment. Its magnetic properties have been optimized in order to induce transversal anisotropy.

Keywords

crystallisation; ferromagnetism; heat treatment; magnetic anisotropy; microsensors; nanostructured materials; sensitivity; amorphous material; conductive film; fabrication; ferromagnetic layer; heat treatment; magnetic field microsensors; magneto-impedance phenomenon; nanocrystalline; non destructive control; sensitivity; transversal anisotropy; Amorphous magnetic materials; Amorphous materials; Conductive films; Iron alloys; Magnetic anisotropy; Magnetic fields; Magnetic films; Microsensors; Perpendicular magnetic anisotropy; Stacking;

fLanguage

English

Publisher

ieee

Conference_Titel

Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on

Conference_Location

Seville

Print_ISBN

978-1-4244-6636-8

Electronic_ISBN

978-2-35500-011-9

Type

conf

Filename

5486466