A dual axis CMOS frontside bulk micromachined thermal accelerometer

Author

Garraud, Alexandra ; Giani, Alain ; Combette, Philippe ; Charlot, Benoît ; Richard, Mathieu

Author_Institution

Inst. d´´Electron. du Sud, Univ. Montpellier, Montpellier, France

fYear

2010

fDate

5-7 May 2010

Firstpage

67

Lastpage

72

Abstract

We present a dual axis accelerometer made with a frontside bulk micromachining on a 0.35 μm CMOS. The accelerometer is based on thermal convection where a central heater creates a hot gas bubble. Acceleration applied to the body will change the temperature distribution on the device, the latter being measured by four detectors containing six serially connected thermocouples. The paper will present the modeling of the device as well as measurements of sensitivity, linearity and crossover.

Keywords

CMOS integrated circuits; accelerometers; convection; micromachining; microsensors; temperature distribution; central heater; crossover measurement; dual axis CMOS frontside bulk micromachined thermal accelerometer; hot gas bubble; linearity measurement; sensitivity measurement; temperature distribution; thermal convection; thermocouples; Acceleration; Accelerometers; CMOS technology; Costs; Gas detectors; Pollution measurement; Seismic measurements; Sensor systems; Temperature sensors; Thermal sensors; CMOS; MEMS; accelerometer; convection; thermal;

fLanguage

English

Publisher

ieee

Conference_Titel

Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on

Conference_Location

Seville

Print_ISBN

978-1-4244-6636-8

Electronic_ISBN

978-2-35500-011-9

Type

conf

Filename

5486473