Title :
Design of a Smart CMOS High-Voltage driver for electrostatic MEMS switches
Author :
Dumas, Norbert ; Latorre, Laurent ; Mailly, Frederick ; Nouet, Pascal
Author_Institution :
LIRMM, Univ. Montpellier II, Montpellier, France
Abstract :
This paper addresses the design of CMOS High-Voltage drivers for the actuation of MEMS relays with pull-in voltage in the 20-50V range. So-called “Smart Drivers” have been developed using a standard High-Voltage CMOS technology. These drivers provide the required high voltage for the MEMS actuation and integrate a diagnosis ability to determine whether the pull-in occurs during the actuation process or not.
Keywords :
CMOS integrated circuits; driver circuits; electrostatic devices; microswitches; MEMS actuation; MEMS relays; diagnosis ability; electrostatic MEMS switches; smart CMOS high-voltage driver; CMOS technology; Capacitance; Dielectrics; Electrodes; Electrostatic actuators; Micromechanical devices; Microswitches; Radio frequency; Switches; Voltage; CMOS; Diagnosis; Electrostatic Switch; MEMS;
Conference_Titel :
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location :
Seville
Print_ISBN :
978-1-4244-6636-8
Electronic_ISBN :
978-2-35500-011-9
