Title :
The improvement study of model for humidity sensor based on quartz glass
Author :
Feng, Dongmei ; Li, Bajin
Author_Institution :
Coll. of Inf. Eng., Inner Mongolia Univ. of Technol., Huhhot, China
Abstract :
This paper analyzes the 20 percent Sn4+-doped titania films who were prepared on the quartz glass humidity sensor by complex impedance analysis, improves the equivalent circuit model whose circuit description code is R(C(R(RC))). This equivalent circuit uses the constant phase angle element Q instead of the capacitance C in the second resistance-capacitance parallel entries, and its circuit description code is R(C(R (RQ))). The results show that the model is more reasonable, because the error is smaller when it is used to fit the impedance spectra of the sensor. The equivalent circuit is convenient for analyzing the diffusion information of the thin films because of the changes of the value of n.
Keywords :
doping; equivalent circuits; glass; humidity sensors; quartz; thin films; tin; titanium compounds; R(C(R(RC))); R(C(R(RQ))); TiO2:Sn4+; circuit description code; constant phase angle element; equivalent circuit model; humidity sensor; impedance analysis; impedance spectra; quartz glass; resistance-capacitance parallel entries; thin films; Capacitance; Educational institutions; Equivalent circuits; Frequency; Glass; Humidity; Impedance; Information analysis; Paper technology; Sensor phenomena and characterization; Equivalent circuit; Humidity sensor; The Q element;
Conference_Titel :
Advanced Computer Control (ICACC), 2010 2nd International Conference on
Conference_Location :
Shenyang
Print_ISBN :
978-1-4244-5845-5
DOI :
10.1109/ICACC.2010.5486988