DocumentCode
519818
Title
The microplasma as a nonlinear microwave component
Author
Kühn, Silvio ; Porteanu, Horia-Eugen ; Gesche, Roland
Author_Institution
Microwave Dept., Ferdinand-Braun-Inst. (FBH), Berlin, Germany
fYear
2010
fDate
15-17 March 2010
Firstpage
262
Lastpage
264
Abstract
This contribution describes the non-linear impedance behavior of an atmospheric low power microwave micro-plasma at 2.4 GHz. A resonant coaxial structure is used to characterize the electrode-driven low-power plasma. By using large signal network analyzing methods the reflection coefficient is measured. From this data, voltage, currents, and impedance are derived to see the non linear plasma behavior. A plasma model for Advanced Design System (ADS) is proposed that provides a realistic plasma load for simulation experiments and design of microwave plasma sources.
Keywords
plasma nonlinear processes; plasma sources; advanced design system; atmospheric low power microwave microplasma; electrode-driven low-power plasma; frequency 2.4 GHz; microwave plasma sources; nonlinear impedance behavior; nonlinear microwave component; reflection coefficient; resonant coaxial structure; Atmospheric measurements; Coaxial components; Impedance; Plasma measurements; Plasma simulation; Plasma sources; Reflection; Resonance; Signal analysis; Voltage; Micro-Plasma Properties; low power plasma; non-linear circuit analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2010 German
Conference_Location
Berlin
Print_ISBN
978-1-4244-4933-0
Electronic_ISBN
978-3-9812668-1-8
Type
conf
Filename
5498279
Link To Document