The microplasma as a nonlinear microwave component

This contribution describes the non-linear impedance behavior of an atmospheric low power microwave micro-plasma at 2.4 GHz. A resonant coaxial structure is used to characterize the electrode-driven low-power plasma. By using large signal network analyzing methods the reflection coefficient is measured. From this data, voltage, currents, and impedance are derived to see the non linear plasma behavior. A plasma model for Advanced Design System (ADS) is proposed that provides a realistic plasma load for simulation experiments and design of microwave plasma sources.