Title :
Design principles and sensitivity analysis of MEMS cantilever sensors
Author :
Matviykiv, Oleh ; Lobur, Mykhaylo
Author_Institution :
CADS Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
The aim of this work is to establish design principles and model equations for analysing sensitivity of MEMS cantilever sensors. Sensitivity and quality factor were estimated to be the most important parameters for MEMS cantilever sensors.
Keywords :
Q-factor; cantilevers; microsensors; sensitivity analysis; MEMS cantilever sensors; model equations; quality factor; sensitivity analysis; Acoustic beams; Chemical sensors; Mechanical sensors; Microelectromechanical devices; Micromechanical devices; Piezoresistive devices; Resonance; Resonant frequency; Sensitivity analysis; Structural beams; Cantilever sensor; Design principles; Sensitivity analysis;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2010 Proceedings of VIth International Conference on
Conference_Location :
Lviv
Print_ISBN :
978-1-4244-7325-0
Electronic_ISBN :
978-966-2191-11-0
