DocumentCode
519870
Title
Modeling of capacitive accelerometer constructions
Author
Teslyuk, Vasyl ; Karkulovskyi, Bohdan ; Kernytskyy, Andriy
Author_Institution
CAD Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
fYear
2010
fDate
20-23 April 2010
Firstpage
208
Lastpage
208
Abstract
Modeling of capacitive accelerometers with different types of fastening are described.
Keywords
accelerometers; capacitive sensors; capacitive accelerometer; electronic devices; micro machining; Acceleration; Accelerometers; Capacitance; Capacitive sensors; Capacitors; Electrodes; Electrostatics; Joining processes; Machining; Solids; ANSYS; Capacitive accelerometer; MEMC; sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2010 Proceedings of VIth International Conference on
Conference_Location
Lviv
Print_ISBN
978-1-4244-7325-0
Electronic_ISBN
978-966-2191-11-0
Type
conf
Filename
5499281
Link To Document