Title :
Development of mathematical model of spring suspension system for microelectromechanical angular Velocity Sensor (MEMS gyroscope)
Author :
Lobur, Mykhaylo ; Holovatyy, Andriy ; Motyka, Ihor
Author_Institution :
Dept. of CAD Syst., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
In the paper a mathematical model for calculating constructive parameters (thickness and length) of the spring element of the spring suspension system for the micromechanical gyroscope (microelectromechanical angular velocity sensor) is developed. The interdependence between the spring suspension system and technical characteristics of the sensor is analyzed.
Keywords :
angular velocity measurement; gyroscopes; microsensors; MEMS gyroscope; constructive parameters calculation; mathematical model; microelectromechanical angular velocity sensor; micromechanical gyroscope; spring element; spring suspension system; Angular velocity; Fabrication; Frequency; Gyroscopes; Integrated circuit technology; Mathematical model; Micromechanical devices; Sensor phenomena and characterization; Sensor systems; Springs; MEMS; MEMS angular velocity sensor; mathematical model; micromechanical gyroscope; spring suspension;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2010 Proceedings of VIth International Conference on
Conference_Location :
Lviv
Print_ISBN :
978-1-4244-7325-0
Electronic_ISBN :
978-966-2191-11-0
