Development of mathematical model of spring suspension system for microelectromechanical angular Velocity Sensor (MEMS gyroscope)

Author

Lobur, Mykhaylo ; Holovatyy, Andriy ; Motyka, Ihor

Author_Institution

Dept. of CAD Syst., Lviv Polytech. Nat. Univ., Lviv, Ukraine

fYear

2010

fDate

20-23 April 2010

Firstpage

95

Lastpage

98

Abstract

In the paper a mathematical model for calculating constructive parameters (thickness and length) of the spring element of the spring suspension system for the micromechanical gyroscope (microelectromechanical angular velocity sensor) is developed. The interdependence between the spring suspension system and technical characteristics of the sensor is analyzed.

Keywords

angular velocity measurement; gyroscopes; microsensors; MEMS gyroscope; constructive parameters calculation; mathematical model; microelectromechanical angular velocity sensor; micromechanical gyroscope; spring element; spring suspension system; Angular velocity; Fabrication; Frequency; Gyroscopes; Integrated circuit technology; Mathematical model; Micromechanical devices; Sensor phenomena and characterization; Sensor systems; Springs; MEMS; MEMS angular velocity sensor; mathematical model; micromechanical gyroscope; spring suspension;

fLanguage

English

Publisher

ieee

Conference_Titel

Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2010 Proceedings of VIth International Conference on

Conference_Location

Lviv

Print_ISBN

978-1-4244-7325-0

Electronic_ISBN

978-966-2191-11-0

Type

conf

Filename

5499317