Title :
Methods planning cantilever of mechanical type
Author :
Dupak, Bohdan ; Lobur, Mykhaylo
Author_Institution :
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
In this work are examined the features of methods planning cantilever of mechanical type.
Keywords :
atomic force microscopy; cantilevers; gas sensors; atomic-power microscopy; methods planning cantilever; scanning power microscopy; sensor; Atomic force microscopy; Force sensors; Frequency modulation; Mechanical sensors; Needles; Power system planning; Resonance; Resonant frequency; Scanning probe microscopy; Surface topography; atomic-power microscopy; cantilever of mechanical type; frequency modulation system; noncontact method; scanning power microscopy;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2010 Proceedings of VIth International Conference on
Conference_Location :
Lviv
Print_ISBN :
978-1-4244-7325-0
Electronic_ISBN :
978-966-2191-11-0
