Title :
The Mathematical Model of the MEMS disc element considering its finite width
Author_Institution :
Reserch Inst. Appl. Electron., Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine
Abstract :
In this paper the mathematical model of the MEMS disc element considering its width value is proposed. This model considers influence on disk resonance frequencies values of disk geometrical parameters. The first, second and third mode values were calculated. Stresses and stains in disc were simulated. Also in this work gives several proposition for future use of the analyses proposed for the telecommunication systems elements (transformer, filter, ect.) development.
Keywords :
micromechanical devices; stress-strain relations; MEMS disc element; disc stains; disc stresses; disk geometrical parameters; disk resonance frequency value; mathematical model; telecommunication system elements; Analytical models; Mathematical model; Micromechanical devices; Piezoelectric materials; Radio frequency; Resonance; Resonant frequency; Solid modeling; Stress; Wireless communication; Deflected Mode; MEMS; Mathematical Model; Resonance frequency; Simulation;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2010 Proceedings of VIth International Conference on
Conference_Location :
Lviv
Print_ISBN :
978-1-4244-7325-0
Electronic_ISBN :
978-966-2191-11-0
