The Mathematical Model of the MEMS disc element considering its finite width

Author

Yulia, Yanovska

Author_Institution

Reserch Inst. Appl. Electron., Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine

fYear

2010

fDate

20-23 April 2010

Firstpage

61

Lastpage

65

Abstract

In this paper the mathematical model of the MEMS disc element considering its width value is proposed. This model considers influence on disk resonance frequencies values of disk geometrical parameters. The first, second and third mode values were calculated. Stresses and stains in disc were simulated. Also in this work gives several proposition for future use of the analyses proposed for the telecommunication systems elements (transformer, filter, ect.) development.

Keywords

micromechanical devices; stress-strain relations; MEMS disc element; disc stains; disc stresses; disk geometrical parameters; disk resonance frequency value; mathematical model; telecommunication system elements; Analytical models; Mathematical model; Micromechanical devices; Piezoelectric materials; Radio frequency; Resonance; Resonant frequency; Solid modeling; Stress; Wireless communication; Deflected Mode; MEMS; Mathematical Model; Resonance frequency; Simulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2010 Proceedings of VIth International Conference on

Conference_Location

Lviv

Print_ISBN

978-1-4244-7325-0

Electronic_ISBN

978-966-2191-11-0

Type

conf

Filename

5499330