DocumentCode
519993
Title
Optical coherence tomography for non-destructive investigation of silicon integrated-circuits
Author
Serrels, K.A. ; Renner, M.K. ; Reid, D.T.
Author_Institution
Ultrafast Opt. Group, Heriot-Watt Univ., Edinburgh, UK
fYear
2010
fDate
16-21 May 2010
Firstpage
1
Lastpage
2
Abstract
We present the development of an ultra-high-resolution high-dynamic-range infrared optical coherence tomography imaging system for the novel purpose of sub-surface inspection of silicon integrated-circuits. Examples of substrate thickness profiling and device feature inspection are demonstrated.
Keywords
nondestructive testing; optical images; optical tomography; supercontinuum generation; device feature inspection; nondestructive investigation; optical coherence tomography; silicon integrated circuits; substrate thickness profiling; Biomedical optical imaging; Inspection; Integrated optics; Nonlinear optics; Optical fiber polarization; Optical imaging; Optical interferometry; Silicon; Tomography; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-890-2
Electronic_ISBN
978-1-55752-890-2
Type
conf
Filename
5499551
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