Title :
Optical coatings for MEMS devices
Author :
Helmbrecht, Michael A.
Author_Institution :
Iris AO, Inc., Berkeley, CA, USA
Abstract :
Microelectromechanical systems (MEMS) devices pose unique constraints for optical coatings. This paper discusses issues unique to coating MEMS devices and describes design changes necessary to coat a deformable mirror with 99.9% reflective dielectric coatings at 532 nm.
Keywords :
antireflection coatings; micromechanical devices; optical films; MEMS devices; deformable mirror; microelectromechanical systems devices; optical coatings; reflective dielectric coatings; wavelength 532 nm; Coatings; Dielectric substrates; Microelectromechanical devices; Micromechanical devices; Mirrors; Optical devices; Optical films; Packaging; Stress; Testing;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
