Title :
High-Q polymeric microcavities
Author :
Hauser, Mario ; Grossmann, Tobias ; Schleede, Simone ; Fischer, Julian ; Beck, Torsten ; Kalt, Heinz ; Vannahme, Christoph ; Mappes, Timo
Author_Institution :
Inst. fur Angewandte Phys., Karlsruhe Inst. of Technol. (KIT), Karlsruhe, Germany
Abstract :
We report on the fabrication of high-Q microresonators made of poly(methyl methacrylate) (PMMA) with a conical shape due to a thermal reflow step. The cavity quality factor is above 2-106 in the 1300 nm wavelength range.
Keywords :
micro-optics; microcavities; microfabrication; micromechanical resonators; optical fabrication; optical polymers; PMMA; cavity quality factor; conical shape; high-Q microresonators; high-Q polymeric microcavities; optical fabrication; thermal reflow step; wavelength 1300 nm; wavelength range; Electron beams; Lithography; Microcavities; Optical filters; Optical resonators; Optical sensors; Optical surface waves; Polymers; Q factor; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
