DocumentCode
520123
Title
Towards fast femtosecond laser micromachining of glass, effect of deposited energy
Author
Rajesh, Sheeba ; Bellouard, Yves
Author_Institution
Mech. Eng. Dept., Eindhoven Univ. of Technol., Eindhoven, Netherlands
fYear
2010
fDate
16-21 May 2010
Firstpage
1
Lastpage
2
Abstract
We report on the effect of deposited energy for micro-machining of fused silica using femtosecond laser irradiation followed by chemical etching.
Keywords
etching; high-speed optical techniques; laser beam machining; optical glass; chemical etching; deposited energy; femtosecond laser micromachining; fused silica; Chemical lasers; Etching; Glass; Micromachining; Nonlinear optics; Optical materials; Optical microscopy; Optical pulses; Pulsed laser deposition; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-890-2
Electronic_ISBN
978-1-55752-890-2
Type
conf
Filename
5499685
Link To Document