Title :
Silicon RF MEMS based optical modulator
Author :
Sridaran, Suresh ; Bhave, Sunil A.
Author_Institution :
OxideMEMS Lab., Cornell Univ., Ithaca, NY, USA
Abstract :
This paper reports on the co-fabrication of photonic whispering gallery mode disk resonators and RF MEMS radial contour mode resonators on the same SOI substrate. By mechanically coupling the MEMS and photonic resonators, we have demonstrated a silicon RF MEMS based optical modulator which can modulate light with wavelength 1560 nm at 288 MHz.
Keywords :
acousto-optical modulation; integrated optics; micromechanical resonators; silicon; silicon-on-insulator; whispering gallery modes; RF MEMS radial contour mode resonators; acousto-optical modulation; frequency 288 MHz; optical modulator; photonic whispering gallery mode disk resonators; wavelength 1560 nm; Optical filters; Optical interferometry; Optical modulation; Optical refraction; Optical resonators; Optical signal processing; Optical variables control; Radiofrequency microelectromechanical systems; Resonance; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
