• DocumentCode
    520296
  • Title

    Optofluidic in-situ fabrication of magnetic actuators in microfluidic channels

  • Author

    Chung, Su Eun ; Kim, Jiyun ; Min, Seungki ; Kim, Nari Lily ; Kwon, Sunghoon

  • Author_Institution
    Sch. of Electr. Eng., Seoul Nat. Univ., Seoul, South Korea
  • fYear
    2010
  • fDate
    16-21 May 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate in-situ fabrication of magnetic actuators using optofluidic maskless lithography (OFML). Photopatterning of magnetic structures in same place with actuation area reduces extra steps for transportation from the fabrication site to actuation site.
  • Keywords
    Actuators; Fabrication; Lithography; Magnetic fields; Magnetic materials; Microfluidics; Micromachining; Microstructure; Nanoparticles; Rails;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
  • Conference_Location
    San Jose, CA, USA
  • Print_ISBN
    978-1-55752-890-2
  • Electronic_ISBN
    978-1-55752-890-2
  • Type

    conf

  • Filename
    5499865
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=520296