Title :
Single-defect photonic crystal cavity laser fabricated by a combined lithography of laser holography and focused ion beam
Author :
Ahn, Sungmo ; Kim, Sihan ; Jeon, Heonsu
Author_Institution :
Dept. of Phys. & Astron., Seoul Nat. Univ., Seoul, South Korea
Abstract :
InP-based square-lattice photonic crystal laser with a single air-hole defect was fabricated by a combined lithography of laser holography and focused ion beam, which enables the large scale and high throughput fabrication of PC-based devices.
Keywords :
Chromium; Holographic optical components; Holography; Indium phosphide; Ion beams; Laser excitation; Laser theory; Lithography; Photonic crystals; Semiconductor lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
