Title :
Photonic devices in low-temperature laser-crystallized deposited silicon
Author :
Preston, Kyle ; Poitras, Carl B. ; Thompson, Michael O. ; Lipson, Michal
Author_Institution :
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
We demonstrate integrated optical devices in deposited silicon crystallized at room temperature for 3D photonic integration. These devices can enable electro-optic switching and modulation on low-temperature substrates such as glass, plastic, and post-back-end CMOS wafers.
Keywords :
Crystallization; Electrooptic devices; Electrooptic modulators; Glass; Lasers and electrooptics; Optical devices; Photonic crystals; Plastics; Silicon; Temperature;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
