• DocumentCode
    520618
  • Title

    Development of two-layer integrated phase masks for three-dimensional photonic crystal template fabrication

  • Author

    Xu, Di ; Chen, Kevin ; Harb, Ahmad ; Lin, Yuankun

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Pittsburgh, Pittsburgh, PA, USA
  • fYear
    2010
  • fDate
    16-21 May 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In this paper, we report the development of an integrated two-layer phase mask for five-beam holographic fabrication of three-dimensional photonic crystal templates.
  • Keywords
    Bonding; Gratings; Holographic optical components; Holography; Interference; Laser theory; Optical device fabrication; Photonic crystals; Resists; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
  • Conference_Location
    San Jose, CA, USA
  • Print_ISBN
    978-1-55752-890-2
  • Electronic_ISBN
    978-1-55752-890-2
  • Type

    conf

  • Filename
    5500205
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=520618