Title :
Development of two-layer integrated phase masks for three-dimensional photonic crystal template fabrication
Author :
Xu, Di ; Chen, Kevin ; Harb, Ahmad ; Lin, Yuankun
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Pittsburgh, Pittsburgh, PA, USA
Abstract :
In this paper, we report the development of an integrated two-layer phase mask for five-beam holographic fabrication of three-dimensional photonic crystal templates.
Keywords :
Bonding; Gratings; Holographic optical components; Holography; Interference; Laser theory; Optical device fabrication; Photonic crystals; Resists; Scanning electron microscopy;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
