DocumentCode
520635
Title
Light extraction enhancement of a light-emitting diode by fabricating surface gratings around the mesa with patterned photoelectrochemical wet etching
Author
Lin, Cheng-Hung ; Chen, Cheng-Yen ; Yeh, Dong-Ming ; Yang, C.C.
Author_Institution
Inst. of Photonics & Optoelectron., Nat. Taiwan Univ., Taipei, Taiwan
fYear
2010
fDate
16-21 May 2010
Firstpage
1
Lastpage
2
Abstract
The >43% enhancement of light extraction by fabricating a surface grating structure around the mesa of a light-emitting diode with an approach combining photoelectrochemical wet etching and phase mask interferometry is demonstrated.
Keywords
Diffraction gratings; Gallium nitride; Gold; Holography; Light emitting diodes; Optical interferometry; Rough surfaces; Scanning electron microscopy; Surface roughness; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location
San Jose, CA, USA
Print_ISBN
978-1-55752-890-2
Electronic_ISBN
978-1-55752-890-2
Type
conf
Filename
5500223
Link To Document