Title :
Integration of nano-photonic devices for CMOS chip-to-chip optical I/O
Author :
Young, Ian A. ; Block, Bruce ; Reshotko, Miriam ; Chang, Peter
Author_Institution :
Technol. Manuf. Group, Intel Corp., Hillsboro, OR, USA
Abstract :
This paper describes an optical interconnect solution based on a monolithic photonic CMOS architecture. A photonic CMOS process enables higher bandwidth and lower energy-per-bit for chip-to-chip optical I/O through integration of electro-optical polymer based modulators, silicon nitride waveguides and polycrystalline germanium (Ge) photodetectors in a CMOS logic process. Experimental results for both the photonic CMOS ring resonator modulators and Ge detectors demonstrate 40 Gb/s performance.
Keywords :
Bandwidth; CMOS process; Integrated optics; Nanoscale devices; Optical devices; Optical interconnections; Optical modulation; Optical polymers; Optical ring resonators; Optical waveguides;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2