• DocumentCode
    521249
  • Title

    Oxidized Silicon-On-Insulator (OxSOI) from bulk silicon: a new photonic platform

  • Author

    Sherwood-Droz, Nicolás ; Gondarenko, Alexander ; Lipson, Michal

  • Author_Institution
    Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
  • fYear
    2010
  • fDate
    16-21 May 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate a bulk silicon alternative to SOI, using Si3N4 masking and oxidation techniques. We show waveguide losses of 2.92 dB/cm with a process compatible with the front-end of a typical CMOS fabrication line.
  • Keywords
    CMOS process; Etching; Optical buffering; Optical device fabrication; Optical interconnections; Optical waveguides; Oxidation; Protection; Silicon on insulator technology; Waveguide components;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
  • Conference_Location
    San Jose, CA, USA
  • Print_ISBN
    978-1-55752-890-2
  • Electronic_ISBN
    978-1-55752-890-2
  • Type

    conf

  • Filename
    5500863
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=521249