Title :
3D AFM characterization of the edge roughness of silicon high Q resonators
Author :
Schiavone, P. ; Martin, M. ; Alipour, P. ; Eftekhar, A. ; Yegnanarayanan, S. ; Adibi, A.
Author_Institution :
UMI 2958 Georgia Tech-CNRS, Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
Nanophotonic resonators are very sensitive to sidewall roughness. We investigate in detail the sidewall roughness, correlation length and fractal roughness exponent for high Q silicon resonators using a 3D AFM
Keywords :
Atomic force microscopy; Data mining; Fractals; Instruments; Optical resonators; Optical surface waves; Rough surfaces; Scanning electron microscopy; Silicon; Surface roughness;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
