Beam switching reflectarray with MEMS controls

This paper presents a 26.5 GHz beam switching reflectarray monolithically fabricated on glass substrate with the RF MEMS switches. The array is formed using 10×10 aperture coupled microstrip patch antenna (ACMPA) elements. RF MEMS switches are implemented on the transmission lines in order to sustain the beam switching. A prototype of a reflectarray with 90 RF MEMS switches is monolithically produced using an in-house surface micromachining process including the wafer bonding steps. The measurement result shows that the beam can be switched to ~ 40° as required.