Research of anti-acceleration disturbance for the micro-machined airflow inclinometer

This paper reported a structural principle of the micro-machined airflow inclinometer and a new method to eliminate disturbance in the inclinometer output signal from movement acceleration. The inclinometer combined with a micro-machined gyroscope and utilized the gyroscope output signal to eliminate disturbance. We established the mathematical model to correct the disturbance from acceleration and designed the algorithm software base on the character of the sensor with the ability to eliminate disturbance from acceleration over 90%.