Title :
Measurement of thickness and electrophysical parameters of nanometer films by means of optical and microwave methods
Author :
Usanov, D.A. ; Skripal, Al V. ; Skripal, An V. ; Abramov, A.V. ; Bogolubov, A.S. ; Bakouie, A.
Author_Institution :
Dept. of Solid State Phys., Saratov State Univ. named after N.G. Tchernyshevsky, Saratov, Russia
Abstract :
The possibility to determine the thickness and electrophysical parameters of thin nanometer dielectric and metal films in sandwich-like structures using the results of measurement of reflection and transmission spectra in microwave and optical band has been shown. The results of measurement of refractive index of SnO2 in the thicknesses range from 40 nm to 2.8 mkm and the results of measurement of conductivity of Cr-films applied to ceramic substrates are presented.
Keywords :
Conductivity measurement; Dielectric measurements; Dielectric thin films; Microwave measurements; Microwave theory and techniques; Optical films; Optical reflection; Optical refraction; Optical variables control; Thickness measurement; Nanometer films; electrical conductivity; microwave and optical measurements; thickness;
Conference_Titel :
Microwave Radar and Wireless Communications (MIKON), 2010 18th International Conference on
Conference_Location :
Vilnius, Lithuania
Print_ISBN :
978-1-4244-5288-0
