Author_Institution :
Coll. of Electr. & Inf. Eng., Hunan Univ., Changsha, China
Abstract :
The importance of force sensing technologies was recognized in the 1970s. Since then, multidimensional microelectromechanical systems (MEMS)/micro force/moment (F/M) sensors have permeated a wide variety of products. A multidimensional MEMS/micro-F/M sensor can measure the tangential force terms along x-, y-, and z-axis (Fx, Fy and Fz) as well as the moments terms about x-, y-, and z-axis (Mx, My and Mz) simultaneously with micro-Newton and nano-Newtonmeter resolution. This paper presents an overview of MEMS/micro-F/M sensors. This field is critical to many biomedical applications, materials science, industrial automation, dimension measurements in microcomponents, and nanomanufacturing applications, and has attracted great activity in the past 15-25 years. The evaluation of different F/M sensing principles, recent advances in various designs, and their significance and limitations are analyzed through specific examples. Furthermore, current challenges and new area for future applications of micro-F/M sensing technology have been identified.
Keywords :
force measurement; force sensors; microsensors; nanosensors; F-M sensor; biomedical application; dimension measurement; force sensing technology; industrial automation; materials science; microNewton resolution; microcomponent application; microelectromechanical system; moment sensing; multidimensional MEMS-microsensor; nanoNewtonmeter resolution; nanomanufacturing application; tangential force measurement; time 15 year to 25 year; Capacitive sensors; Force; Micromechanical devices; Sensor phenomena and characterization; Silicon; Force measurement; micro sensor; moment measurement; multi-dimensional;
