DocumentCode
528001
Title
Multi-user-multi-chip integrated MEMS for micro optics
Author
Toshiyoshi, H.
Author_Institution
Res. Center for Adv. Sci. & Technol. (RCAST), Univ. of Tokyo, Tokyo, Japan
fYear
2010
fDate
5-9 July 2010
Firstpage
240
Lastpage
241
Abstract
This paper presents a new multi-user-multi-chip framework for integrated MEMS in the CMOS-first and MEMS-last style that could be useful to develop highly functional opto-mechanical devices such as WSS mirror array with high-voltage level shifters.
Keywords
micro-optomechanical devices; mirrors; MEMS; WSS mirror array; high-voltage level shifters; micro-optics; multi-user-multi-chip framework; opto-mechanical devices; Arrays; CMOS integrated circuits; Large scale integration; Micromechanical devices; Mirrors; Optical switches;
fLanguage
English
Publisher
ieee
Conference_Titel
OptoElectronics and Communications Conference (OECC), 2010 15th
Conference_Location
Sapporo
Print_ISBN
978-1-4244-6785-3
Type
conf
Filename
5587932
Link To Document