Title :
Monolithic integration of germanium photodetectors and silicon wire waveguide devices
Author :
Tsuchizawa, Tai ; Park, Sungbong ; Watanabe, Toshifumi ; Shinojima, Hiroyuki ; Nishi, Hidetaka ; Yamada, Koji ; Ishikawa, Yasuhiko ; Wada, Kazumi ; Itabashi, Seiichi
Author_Institution :
NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
Abstract :
We describe our recent progress in Si photonic integration technology focusing on the monolithic integration of a germanium photodetector and a silicon-wire-waveguide variable optical attenuator.
Keywords :
elemental semiconductors; germanium; optical attenuators; optical waveguides; photodetectors; semiconductor devices; silicon; waveguide attenuators; Ge; Si; germanium photodetectors; monolithic integration; silicon photonic integration technology; silicon-wire-waveguide variable optical attenuator; Optical attenuators; Optical fibers; Photodetectors; Photonics; Silicon; Wire;
Conference_Titel :
OptoElectronics and Communications Conference (OECC), 2010 15th
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-6785-3
