Precision motion control of a nano stage using repetitive control and double-feedforward compensation

Author

Lin, Chi-Ying ; Chen, Po-Ying

Author_Institution

Dept. of Mech. Eng., Nat. Taiwan Univ. of Sci. & Technol., Taipei, Taiwan

fYear

2010

fDate

18-21 Aug. 2010

Firstpage

22

Lastpage

29

Abstract

This article presents precision motion control of an XY nano stage using repetitive control and double-feedforward compensation. The XY nano stage is composed of two piezoelectric actuators within a leaf spring mechanism. This study applies a repetitive controller and a Proportional-Integral-Derivative controller to achieve precision trajectory tracking. Moreover, the investigation applies a double-feedforward compensation approach that integrates a Zero-Phase-Error-Tracking-Controller, based on an inverse Prandtl-Ishlinskii model, to improve tracking control performance further. Performance analysis and comparison with experimental results demonstrate that the proposed control structure improves dynamic tracking accuracy of the XY nano stage.

Keywords

compensation; feedforward; motion control; optimal control; piezoelectric actuators; position control; springs (mechanical); three-term control; XY nano stage; double-feedforward compensation; inverse Prandtl-Ishlinskii model; leaf spring mechanism; piezoelectric actuators; precision motion control; proportional-integral-derivative controller; repetitive control; trajectory tracking; zero-phase-error-tracking-controller; Adaptive control; Feedforward neural networks; Hysteresis; Inverse problems; Mathematical model; Tracking; Trajectory; Prandtl-Ishlinskii operator; XY nano stage; feedforward compensation; repetitive controller; tracking control;

fLanguage

English

Publisher

ieee

Conference_Titel

SICE Annual Conference 2010, Proceedings of

Conference_Location

Taipei

Print_ISBN

978-1-4244-7642-8

Type

conf

Filename

5602499