Introduction to research activities on traceable force measurements below 10 μN in center for measurement standards

This paper introduces the research activities on traceable force measurements below 10 micronewton in Center for Measurement Standards (CMS), Industrial Technology Research Institute (ITRI). The introduction includes a force measurement system based on a torsion pendulum for the calibration of radiation pressure force and electrostatic force, and another force calibration system based on a flex-pivot mechanical structure which allows the comparison between milligram scale deadweight force and electrostatic force. The principles and recent progresses of these research activities will be presented.