Title :
Integration both PI and PD type fuzzy controllers for a Scanning Probe Microscope system design
Author :
Chang, Po-Kuang ; Lin, Jium-Ming
Author_Institution :
Inst. of Eng. Sci., Chung-Hua Univ., Hsinchu, Taiwan
Abstract :
This research is to use a Proportion and Integration (PI) as well as a Proportion and Derivative (PD) type of fuzzy controllers to reduce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical implementation to reduce the hysteresis effect of the force actuator. Comparisons with the previous designs with and without Linear Velocity Transducer (LVT) for inner-loop feedback compensation are also made. Thus the new design is cheaper and valuable.
Keywords :
PD control; PI control; actuators; feedback; force sensors; fuzzy control; hysteresis; physical instrumentation control; scanning probe microscopy; transducers; MATLAB; PD controller; PI controller; force actuator; fuzzy controller; hysteresis effect; inner loop feedback compensation; linear velocity transducer; proportion and derivative controller; proportion and integration controller; scanning probe microscope system design; Actuators; Force; Hysteresis; Magnetic hysteresis; Niobium; Probes; System analysis and design; Hysteresis effect; PD type fuzzy controller; PI type fuzzy controller; SPM;
Conference_Titel :
SICE Annual Conference 2010, Proceedings of
Conference_Location :
Taipei
Print_ISBN :
978-1-4244-7642-8
