Integration both PI and PD type fuzzy controllers for a Scanning Probe Microscope system design

Author

Chang, Po-Kuang ; Lin, Jium-Ming

Author_Institution

Inst. of Eng. Sci., Chung-Hua Univ., Hsinchu, Taiwan

fYear

2010

fDate

18-21 Aug. 2010

Firstpage

1875

Lastpage

1879

Abstract

This research is to use a Proportion and Integration (PI) as well as a Proportion and Derivative (PD) type of fuzzy controllers to reduce the hysteresis effect of a force actuator for a Scanning Probe Microscope (SPM). This improvement has been verified by MATLAB simulation and practical implementation to reduce the hysteresis effect of the force actuator. Comparisons with the previous designs with and without Linear Velocity Transducer (LVT) for inner-loop feedback compensation are also made. Thus the new design is cheaper and valuable.

Keywords

PD control; PI control; actuators; feedback; force sensors; fuzzy control; hysteresis; physical instrumentation control; scanning probe microscopy; transducers; MATLAB; PD controller; PI controller; force actuator; fuzzy controller; hysteresis effect; inner loop feedback compensation; linear velocity transducer; proportion and derivative controller; proportion and integration controller; scanning probe microscope system design; Actuators; Force; Hysteresis; Magnetic hysteresis; Niobium; Probes; System analysis and design; Hysteresis effect; PD type fuzzy controller; PI type fuzzy controller; SPM;

fLanguage

English

Publisher

ieee

Conference_Titel

SICE Annual Conference 2010, Proceedings of

Conference_Location

Taipei

Print_ISBN

978-1-4244-7642-8

Type

conf

Filename

5603106