Title :
Investigation on the sensitivity of direct coupling porous silicon membrane waveguide sensor
Author :
Pan, Shengfei ; Rong, Guoguang
Author_Institution :
Sch. of Microelectron., Shanghai Jiao Tong Univ., Shanghai, China
Abstract :
A direct coupling porous silicon waveguide biosensor structure utilizing propagation wave is proposed. The waveguide sensor has a porous silicon membrane as the core and two metal layers as cladding. Direct coupling of light is possible due to attenuated total reflection at the air-metal interface. Sensitivities of two interrogation methods using this sensor structure have been studied, the mode angle shifting (MAS) method and the reflectance shifting (RS) method. Relationships between sensitivity and mode angle, porous silicon membrane thickness, and laser source wavelength and polarization have been investigated through simulation.
Keywords :
biosensors; claddings; elemental semiconductors; membranes; optical couplers; optical waveguides; porous semiconductors; reflectivity; silicon; air-metal interface; cladding; direct coupling porous silicon waveguide biosensor; interrogation method; mode angle shifting method; porous silicon membrane; reflectance shifting method; Biomembranes; Couplings; Optical waveguides; Reflectivity; Refractive index; Sensitivity; Silicon; biosensor; direct coupling; porous silicon; waveguide;
Conference_Titel :
Microelectronics and Electronics (PrimeAsia), 2010 Asia Pacific Conference on Postgraduate Research in
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-6735-8
Electronic_ISBN :
978-1-4244-6736-5
DOI :
10.1109/PRIMEASIA.2010.5604884
