Title :
Impact of the electrodes on the tunability of paraelectric BST film based FBARs
Author :
Gevorgian, S. ; Vorobiev, A.
Author_Institution :
Dept. of Microtechnol. & Nanosci., Chalmers Univ. of Technol., Gothenburg, Sweden
Abstract :
It is shown that tunability of the paraelectric film based FBARs is substantially suppressed by the electrodes. Electrodes with higher impedance “push” the acoustic field from non-tunable electrodes into tunable ferroelectric film thereby increase the tuning of the resonant frequency and effective coupling coefficient.
Keywords :
acoustic field; acoustic resonators; barium compounds; bulk acoustic wave devices; electric impedance; electrodes; electromagnetic coupling; ferroelectric materials; acoustic field; coupling coefficient; film bulk acoustic resonator; impedance; nontunable electrode; paraelectric BST film; resonant frequency tuning; tunability; tunable ferroelectric film; Couplings; Electrodes; Film bulk acoustic resonators; Films; Impedance; Resonant frequency;
Conference_Titel :
Microwave Conference (EuMC), 2010 European
Conference_Location :
Paris
Print_ISBN :
978-1-4244-7232-1
